Litho-AsymVnet: super-resolution lithography modeling with an asymmetric V-net architecture

Qing Zhang, Yuhang Zhang, Wei Lu, Huajie Huang, Zheng Zhong, Congshu Zhou, Yongfu Li. Litho-AsymVnet: super-resolution lithography modeling with an asymmetric V-net architecture. Science in China Series F: Information Sciences, 66(12), December 2023. [doi]

Abstract

Abstract is missing.