Shijing Zhang, Hongfei Zhao, Xuefeng Ma, Jie Deng, Yingxiang Liu. A 3-DOF Piezoelectric Micromanipulator Based on Symmetric and Antisymmetric Bending of a Cross-Shaped Beam. IEEE Transactions on Industrial Electronics, 70(8):8264-8275, August 2023. [doi]
Abstract is missing.