Xiaoyang Zhang, Liang Zhou, Huikai Xie. A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph. Micromachines, 6(12):1876-1889, 2015. [doi]
@article{ZhangZX15-2,
title = {A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph},
author = {Xiaoyang Zhang and Liang Zhou and Huikai Xie},
year = {2015},
doi = {10.3390/mi6121460},
url = {http://dx.doi.org/10.3390/mi6121460},
researchr = {https://researchr.org/publication/ZhangZX15-2},
cites = {0},
citedby = {0},
journal = {Micromachines},
volume = {6},
number = {12},
pages = {1876-1889},
}