A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph

Xiaoyang Zhang, Liang Zhou, Huikai Xie. A Fast, Large-Stroke Electrothermal MEMS Mirror Based on Cu/W Bimorph. Micromachines, 6(12):1876-1889, 2015. [doi]

Abstract

Abstract is missing.