Micromechanical resonant electrostatic charge sensor with micro-leverage mechanisms

Jiuxuan Zhao, Hong Ding, Jin Xie. Micromechanical resonant electrostatic charge sensor with micro-leverage mechanisms. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 111-115, IEEE, 2015. [doi]

Abstract

Abstract is missing.