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Fabrication Technology and Characteristics Research of a Monolithically-Integrated 2D Magnetic Field Sensor Based on Silicon Magnetic Sensitive Transistors

Xiaofeng Zhao, Chenchen Jin, Qi Deng, Meiwei Lv, Dianzhong Wen. Fabrication Technology and Characteristics Research of a Monolithically-Integrated 2D Magnetic Field Sensor Based on Silicon Magnetic Sensitive Transistors. Sensors, 18(8):2551, 2018. [doi]

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