Automated Performance Optimisation and Layout Synthesis of MEMS Accelerometer with Sigma-Delta Force-Feedback Control Loop

Chenxu Zhao, Tom J. Kazmierski. Automated Performance Optimisation and Layout Synthesis of MEMS Accelerometer with Sigma-Delta Force-Feedback Control Loop. In 2008 IEEE International Behavioral Modeling and Simulation Workshop, BMAS 2008, San Jose, CA, USA, September 25-26, 2008. pages 19-24, IEEE, 2008. [doi]

Abstract

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