Study of a novel bi-stable and easy integrated MEMS ETBS

Yue Zhao, Wenzhong Lou, Dongguang Li. Study of a novel bi-stable and easy integrated MEMS ETBS. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 257-260, IEEE, 2012. [doi]

Abstract

Abstract is missing.