Low-Noise Quality Factor Tuning in Nondegenerate MEMS Gyroscope Without Dedicated Tuning Electrode

Yang Zhao 0007, Qin Shi, Guo Ming Xia, An Ping Qiu. Low-Noise Quality Factor Tuning in Nondegenerate MEMS Gyroscope Without Dedicated Tuning Electrode. IEEE Transactions on Industrial Electronics, 71(4):4230-4240, April 2024. [doi]

Abstract

Abstract is missing.