Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation

Yang Zhao 0007, Guo Ming Xia, Qin Shi, An Ping Qiu. Expanding Bias-instability of MEMS Silicon Oscillating Accelerometer Utilizing AC Polarization and Self-Compensation. Sensors, 20(5):1455, 2020. [doi]

Abstract

Abstract is missing.