Detection of volatile organic compunds by high-Q piezotransduced single-crystal silicon bulk acoustic resonator arrays - researchr publication authors

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Yuan Zhao, Qingrui Yang, Ye Chang, Rui Zhang, Jin Tao, Hemi Qu, Xuexin Duan. Detection of volatile organic compunds by high-Q piezotransduced single-crystal silicon bulk acoustic resonator arrays. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

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