Detection of volatile organic compunds by high-Q piezotransduced single-crystal silicon bulk acoustic resonator arrays

Yuan Zhao, Qingrui Yang, Ye Chang, Rui Zhang, Jin Tao, Hemi Qu, Xuexin Duan. Detection of volatile organic compunds by high-Q piezotransduced single-crystal silicon bulk acoustic resonator arrays. In 2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016. pages 1-3, IEEE, 2016. [doi]

@inproceedings{ZhaoYCZTQD16,
  title = {Detection of volatile organic compunds by high-Q piezotransduced single-crystal silicon bulk acoustic resonator arrays},
  author = {Yuan Zhao and Qingrui Yang and Ye Chang and Rui Zhang and Jin Tao and Hemi Qu and Xuexin Duan},
  year = {2016},
  doi = {10.1109/ICSENS.2016.7808661},
  url = {https://doi.org/10.1109/ICSENS.2016.7808661},
  researchr = {https://researchr.org/publication/ZhaoYCZTQD16},
  cites = {0},
  citedby = {0},
  pages = {1-3},
  booktitle = {2016 IEEE SENSORS, Orlando, FL, USA, October 30 - November 3, 2016},
  publisher = {IEEE},
  isbn = {978-1-4799-8287-5},
}