An Operation-Group Based Soft Scheduling Approach for Uncertain Semiconductor Wafer Fabrication System

Hua-xing Zhong, Min Liu, Jinghua Hao, Shenglong Jiang. An Operation-Group Based Soft Scheduling Approach for Uncertain Semiconductor Wafer Fabrication System. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 48(8):1332-1347, 2018. [doi]

Abstract

Abstract is missing.