Longjie Zhong, Shubin Liu, Donglai Xu, Zhangming Zhu. A 63 μg/√Hz Noise Floor and 14 pJ Power Efficiency Open-Loop MEMS Capacitive Accelerometer Using Closed-Loop Hybrid Dynamic Amplifier. IEEE Trans. Circuits Syst. I Regul. Pap., 70(4):1531-1541, April 2023. [doi]
Abstract is missing.