Digital charge control for reducing nonlinearity in fast steering mirrors driven by piezoelectric actuators

Jianpeng Zhong, Rina Nishida, Tadahiko Shinshi. Digital charge control for reducing nonlinearity in fast steering mirrors driven by piezoelectric actuators. In 30th IEEE International Symposium on Industrial Electronics, ISIE 2021, Kyoto, Japan, June 20-23, 2021. pages 1-6, IEEE, 2021. [doi]

Abstract

Abstract is missing.