Two-step gate-recess process combining selective wet-etching and digital wet-etching for InAlAs/InGaAs InP-based HEMTs

Ying-hui Zhong, Shu-xiang Sun, Wen-bin Wong, Hai-li Wang, Xiao-ming Liu, Zhi-yong Duan, Peng Ding, Zhi Jin. Two-step gate-recess process combining selective wet-etching and digital wet-etching for InAlAs/InGaAs InP-based HEMTs. Journal of Zhejiang University - Science C, 18(8):1180-1185, 2017. [doi]

Authors

Ying-hui Zhong

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Shu-xiang Sun

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Wen-bin Wong

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Hai-li Wang

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Xiao-ming Liu

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Zhi-yong Duan

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Peng Ding

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Zhi Jin

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