Fabrication of complicated three dimensional structures utilizing multi-stack bonding - researchr publication authors

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Mingda Zhou, Yilong Hao, Chengchen Gao, Zhihong Li, Qifang Hu. Fabrication of complicated three dimensional structures utilizing multi-stack bonding. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 1107-1111, IEEE, 2009. [doi]

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