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Intelligent GRU-RIC Position-Loop Feedforward Compensation Control Method With Application to an Ultraprecision Motion Stage

Ran Zhou 0001, Chuxiong Hu, Tiansheng Ou, Ze Wang 0002, Yu Zhu. Intelligent GRU-RIC Position-Loop Feedforward Compensation Control Method With Application to an Ultraprecision Motion Stage. IEEE Trans. Industrial Informatics, 20(4):5609-5621, April 2024. [doi]

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