Design and fabrication of a micro-electromechanical system sandwich capacitive accelerometer - researchr publication authors

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Xiaofeng Zhou, Youling Lin, Lufeng Che, Xiaolin Li, Jian Wu 0010, Yuelin Wang. Design and fabrication of a micro-electromechanical system sandwich capacitive accelerometer. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 28-31, IEEE, 2014. [doi]

This author has not been identified. Look up 'Xiaofeng Zhou' in GoogleThis author has not been identified. Look up 'Youling Lin' in GoogleThis author has not been identified. Look up 'Lufeng Che' in GoogleThis author has not been identified. Look up 'Xiaolin Li' in GoogleThis author has not been identified. Look up 'Jian Wu 0010' in GoogleThis author has not been identified. Look up 'Yuelin Wang' in Google

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