Xiaofeng Zhou, Youling Lin, Lufeng Che, Xiaolin Li, Jian Wu 0010, Yuelin Wang. Design and fabrication of a micro-electromechanical system sandwich capacitive accelerometer. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 28-31, IEEE, 2014. [doi]
Abstract is missing.