Kailong Zhou, Lina Sun, Fei Ge, Zhenchuan Yang, Guizhen Yan. A capacitive readout circuit with DC sensing method for micromachined gyroscopes. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 712-715, IEEE, 2012. [doi]
Abstract is missing.