Wu Zhou, Wei Su, Xiao-Ping He, Bai-Lin Li, Li-Li Chen. Application of parallel capacitor for force transferring in resonant micro accelerometer. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 479-482, IEEE, 2010. [doi]
Abstract is missing.