Road to commercialize ArF technology for Si photonics through wafer-level assessment

Haifeng Zhou, Win Kay Thi, Kok Kiong Chen, Chao Li, Huijuan Zhang, Andy Eu-Jin Lim, Mingbin Yu, Guo-Qiang Lo. Road to commercialize ArF technology for Si photonics through wafer-level assessment. In Optical Fiber Communications Conference and Exhibition, OFC 2015, Los Angeles, CA, USA, March 22-26, 2015. pages 1-3, IEEE, 2015. [doi]

Abstract

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