A Quadrature Phase-Locked Loop Based Digital Closed-Loop System for MEMS Resonant Sensors

Mengyang Zhou, Jiahui Yao, Yulan Lu, Bo Xie 0006, Junbo Wang 0002, Deyong Chen, Jian Chen 0012, Xiaoye Huo, Nan Li. A Quadrature Phase-Locked Loop Based Digital Closed-Loop System for MEMS Resonant Sensors. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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