Design, prototyping, modeling and control of a MEMS nanopositioning stage - researchr publication authors

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Y. Zhu, Ali Bazaei, S. O. Reza Moheimani, Mehmet R. Yuce. Design, prototyping, modeling and control of a MEMS nanopositioning stage. In American Control Conference, ACC 2011, San Francisco, CA, USA, June 29 - July 1, 2011. pages 2278-2283, IEEE, 2011. [doi]

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