Design, prototyping, modeling and control of a MEMS nanopositioning stage

Y. Zhu, Ali Bazaei, S. O. Reza Moheimani, Mehmet R. Yuce. Design, prototyping, modeling and control of a MEMS nanopositioning stage. In American Control Conference, ACC 2011, San Francisco, CA, USA, June 29 - July 1, 2011. pages 2278-2283, IEEE, 2011. [doi]

@inproceedings{ZhuBMY11,
  title = {Design, prototyping, modeling and control of a MEMS nanopositioning stage},
  author = {Y. Zhu and Ali Bazaei and S. O. Reza Moheimani and Mehmet R. Yuce},
  year = {2011},
  doi = {10.1109/ACC.2011.5991449},
  url = {https://doi.org/10.1109/ACC.2011.5991449},
  researchr = {https://researchr.org/publication/ZhuBMY11},
  cites = {0},
  citedby = {0},
  pages = {2278-2283},
  booktitle = {American Control Conference, ACC 2011, San Francisco, CA, USA, June 29 - July 1, 2011},
  publisher = {IEEE},
  isbn = {978-1-4577-0081-1},
}