Surface analysis and process optimization of black silicon

Fu-Yun Zhu, Qian-Li Di, Xing-Juan Zeng, Xiao-Sheng Zhang, Xin Zhao, Haixia Zhang. Surface analysis and process optimization of black silicon. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 567-570, IEEE, 2012. [doi]

Abstract

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