Guchuan Zhu, Jean Lévine, Laurent Praly. On the differential flatness and control of electrostatically actuated MEMS. In American Control Conference, ACC 2005, Portland, OR, USA, 8-10 June, 2005. pages 2493-2498, IEEE, 2005. [doi]
@inproceedings{ZhuLP05-0,
title = {On the differential flatness and control of electrostatically actuated MEMS},
author = {Guchuan Zhu and Jean Lévine and Laurent Praly},
year = {2005},
doi = {10.1109/ACC.2005.1470341},
url = {http://dx.doi.org/10.1109/ACC.2005.1470341},
researchr = {https://researchr.org/publication/ZhuLP05-0},
cites = {0},
citedby = {0},
pages = {2493-2498},
booktitle = {American Control Conference, ACC 2005, Portland, OR, USA, 8-10 June, 2005},
publisher = {IEEE},
}