Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film

Hong Zhu, Jianmin Miao, Bangtao Chen, Zhihong Wang, Weiguan Zhu. Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film. International Journal of Computational Engineering Science, 4(3):509-512, 2003. [doi]

Abstract

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