A Flexure-Based Parallel Actuation Dual-Stage System for Large-Stroke Nanopositioning

Haiyue Zhu, Chee Khiang Pang, Tat Joo Teo. A Flexure-Based Parallel Actuation Dual-Stage System for Large-Stroke Nanopositioning. IEEE Transactions on Industrial Electronics, 64(7):5553-5563, 2017. [doi]

Authors

Haiyue Zhu

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Chee Khiang Pang

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Tat Joo Teo

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