A Flexure-Based Parallel Actuation Dual-Stage System for Large-Stroke Nanopositioning

Haiyue Zhu, Chee Khiang Pang, Tat Joo Teo. A Flexure-Based Parallel Actuation Dual-Stage System for Large-Stroke Nanopositioning. IEEE Transactions on Industrial Electronics, 64(7):5553-5563, 2017. [doi]

Abstract

Abstract is missing.