Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down

Qinghua Zhu, Yan Qiao, Naiqi Wu. Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down. IEEE CAA J. Autom. Sinica, 6(2):553-565, 2019. [doi]

Authors

Qinghua Zhu

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Yan Qiao

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Naiqi Wu

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