Qinghua Zhu, Yan Qiao, Naiqi Wu. Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down. IEEE CAA J. Autom. Sinica, 6(2):553-565, 2019. [doi]
@article{ZhuQW19,
title = {Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down},
author = {Qinghua Zhu and Yan Qiao and Naiqi Wu},
year = {2019},
doi = {10.1109/JAS.2019.1911411},
url = {https://doi.org/10.1109/JAS.2019.1911411},
researchr = {https://researchr.org/publication/ZhuQW19},
cites = {0},
citedby = {0},
journal = {IEEE CAA J. Autom. Sinica},
volume = {6},
number = {2},
pages = {553-565},
}