Modeling and schedulability analysis of single-arm multi-cluster tools with residency time constraints via Petri nets

Qinghua Zhu, Naiqi Wu, Yan Qiao, MengChu Zhou. Modeling and schedulability analysis of single-arm multi-cluster tools with residency time constraints via Petri nets. In 2014 IEEE International Conference on Automation Science and Engineering, CASE 2014, New Taipei, Taiwan, August 18-22, 2014. pages 81-86, IEEE, 2014. [doi]

Abstract

Abstract is missing.