Fu-Yun Zhu, Xiao-Sheng Zhang, Wei Hu, Hai-Xia Zhang. Controllable formation and optical characterization of silicon nanocone-forest using SF6/C4F8 in cyclic etching-passivation process. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1034-1037, IEEE, 2013. [doi]
@inproceedings{ZhuZHZ13-1,
title = {Controllable formation and optical characterization of silicon nanocone-forest using SF6/C4F8 in cyclic etching-passivation process},
author = {Fu-Yun Zhu and Xiao-Sheng Zhang and Wei Hu and Hai-Xia Zhang},
year = {2013},
doi = {10.1109/NEMS.2013.6559899},
url = {http://dx.doi.org/10.1109/NEMS.2013.6559899},
researchr = {https://researchr.org/publication/ZhuZHZ13-1},
cites = {0},
citedby = {0},
pages = {1034-1037},
booktitle = {8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013},
publisher = {IEEE},
}