Fu-Yun Zhu, Xiao-Sheng Zhang, Wei Hu, Hai-Xia Zhang. Controllable formation and optical characterization of silicon nanocone-forest using SF6/C4F8 in cyclic etching-passivation process. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 1034-1037, IEEE, 2013. [doi]
Abstract is missing.