Multiobjective Scheduling of Dual-Blade Robotic Cells in Wafer Fabrication

Qinghua Zhu, MengChu Zhou, Yan Qiao, Naiqi Wu, Yan Hou. Multiobjective Scheduling of Dual-Blade Robotic Cells in Wafer Fabrication. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 50(12):5015-5023, 2020. [doi]

Abstract

Abstract is missing.