Optimization Design Method of MEMS-IMU Structure

J. H. Zhuang, Y. X. Liu, C. H. He, R. Z. Zhang, B. Zhou, X. Y. Cheng. Optimization Design Method of MEMS-IMU Structure. In 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, April 11-14, 2019. pages 466-470, IEEE, 2019. [doi]

Abstract

Abstract is missing.