Fabrication of and cell growth on 'silicon membranes' with high density TSVs for bio-sensing applications

Muneeb Zia, Chaoqi Zhang, Paragkumar Thadesar, Tracy Hookway, Taiyun Chi, Joe Gonzalez, Todd C. McDevitt, Hua Wang 0006, Muhannad S. Bakir. Fabrication of and cell growth on 'silicon membranes' with high density TSVs for bio-sensing applications. In IEEE Biomedical Circuits and Systems Conference, BioCAS 2015, Atlanta, GA, USA, October 22-24, 2015. pages 1-4, IEEE, 2015. [doi]

@inproceedings{ZiaZTHCGM0B15,
  title = {Fabrication of and cell growth on 'silicon membranes' with high density TSVs for bio-sensing applications},
  author = {Muneeb Zia and Chaoqi Zhang and Paragkumar Thadesar and Tracy Hookway and Taiyun Chi and Joe Gonzalez and Todd C. McDevitt and Hua Wang 0006 and Muhannad S. Bakir},
  year = {2015},
  doi = {10.1109/BioCAS.2015.7348428},
  url = {https://doi.org/10.1109/BioCAS.2015.7348428},
  researchr = {https://researchr.org/publication/ZiaZTHCGM0B15},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {IEEE Biomedical Circuits and Systems Conference, BioCAS 2015, Atlanta, GA, USA, October 22-24, 2015},
  publisher = {IEEE},
  isbn = {978-1-4799-7234-0},
}