Fabrication of and cell growth on 'silicon membranes' with high density TSVs for bio-sensing applications

Muneeb Zia, Chaoqi Zhang, Paragkumar Thadesar, Tracy Hookway, Taiyun Chi, Joe Gonzalez, Todd C. McDevitt, Hua Wang 0006, Muhannad S. Bakir. Fabrication of and cell growth on 'silicon membranes' with high density TSVs for bio-sensing applications. In IEEE Biomedical Circuits and Systems Conference, BioCAS 2015, Atlanta, GA, USA, October 22-24, 2015. pages 1-4, IEEE, 2015. [doi]

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