Mehadi Hasan Ziko, M. Siraj Ghouri, Ants Koel. Modeling and Simulation of MEMS Capacitive Displacement Sensors. In 15th IEEE International Conference on Nano/Micro Engineered and Molecular System, NEMS 2020, San Diego, CA, USA, September 27-30, 2020. pages 171-175, IEEE, 2020. [doi]
Abstract is missing.