Structural and electronic properties of heavily phosphorus doped polycrystalline silicon thin films

Sanja Zonja, Mile Ivanda, Miroslav Ocko, Tomislav Suligoj, Marko Koricic, Petar Biljanovic. Structural and electronic properties of heavily phosphorus doped polycrystalline silicon thin films. In MIPRO, 2011 Proceedings of the 34th International Convention, Opatija, Croatia, 23-27 May, 2011. pages 33-38, IEEE, 2011. [doi]

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