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Improved electrical characteristics and reliability of amorphous InGaZnO metal-insulator-semiconductor capacitor with high kappa HfO::x::N::y:: gate dielectric

Xiao Zou, Guojia Fang, Longyan Yuan, Xingsheng Tong, Xingzhong Zhao. Improved electrical characteristics and reliability of amorphous InGaZnO metal-insulator-semiconductor capacitor with high kappa HfO::x::N::y:: gate dielectric. Microelectronics Reliability, 50(7):954-958, 2010. [doi]

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