Self-aligned double patterning (SADP) layout decomposition

Minoo Mirsaeedi, J. Andres Torres, Mohab Anis. Self-aligned double patterning (SADP) layout decomposition. In Proceedings of the 12th International Symposium on Quality Electronic Design, ISQED 2011, Santa Clara, California, USA, 14-16 March 2011. pages 103-109, IEEE, 2011. [doi]

Abstract

Abstract is missing.