Journal: Proceedings of the IEEE

Volume 86, Issue 8

1534 -- 1535Kaigham J. Gabriel. Microelectromechanical systems
1536 -- 1551Gregory T. A. Kovacs, Nadim I. Maluf, Kurt E. Petersen. Bulk micromachining of silicon
1552 -- 1574James M. Bustillo, Roger T. Howe, Richard S. Muller. Surface micromachining for microelectromechanical systems
1575 -- 1585Martin A. Schmidt. Wafer-to-wafer bonding for microstructure formation
1586 -- 1593H. Guckel. High-aspect-ratio micromachining via deep X-ray lithography
1594 -- 1609Mehran Mehregany, Christian A. Zorman, Narayanan Rajan, Chien-Hung Wu. Silicon carbide MEMS for harsh environments
1611 -- 1626Stephen D. Senturia. CAD challenges for microsensors, microactuators, and microsystems
1627 -- 1639Masayoshi Esashi, Susumu Sugiyama, Kyoichi Ikeda, Yuelin Wang, Haruzo Miyashita. Vacuum-sealed silicon micromachined pressure sensors
1640 -- 1659Navid Yazdi, Farrokh Ayazi, Khalil Najafi. Micromachined inertial sensors
1660 -- 1678Henry Baltes, Oliver Paul, Oliver Brand. Micromachined thermally based CMOS microsensors
1679 -- 1686B. E. Cole, R. E. Higashi, R. A. Wood. Monolithic two-dimensional arrays of micromachined microstructures for infrared applications
1687 -- 1704Peter F. Van Kessel, Larry J. Hornbeck, Robert E. Meier, Michael R. Douglass. A MEMS-based projection display
1705 -- 1720Richard S. Muller, Kam Y. Lau. Surface-micromachined microoptical elements and systems
1721 -- 1732Hiroyuki Fujita. Microactuators and micromachines
1733 -- 1746Andrew Mason, Navid Yazdi, Abhijeet V. Chavan, Khalil Najafi, Kensall D. Wise. A generic multielement microsystem for portable wireless applications
1747 -- 1755David S. Eddy, Douglas R. Sparks. Application of MEMS technology in automotive sensors and actuators
1756 -- 1768Clark T.-C. Nguyen, Linda P. B. Katehi, Gabriel M. Rebeiz. Micromachined devices for wireless communications
1769 -- 1787Carlos H. Mastrangelo, Mark A. Burns, David T. Burke. Microfabricated devices for genetic diagnostics
1788 -- 1791William R. Perkins. Introduction To "a Brief History Of Electrical Engineering Education"
1792 -- 1800Frederick E. Terman. A Brief History Of Electrical Engineering Education
1801 -- 1802R. M. Page. Man~machine Coupling - 2012 A.D
1803 -- 1807Rosalind W. Picard. Human-computer coupling
1808 -- 1809James E. Brittain. John Hopkinson And The Rationalization Of Dynamo Design