Sudipta Paul 0001, Pritha Banerjee, Susmita Sur-Kolay. Minimization of Flare in EUVL by Simultaneous Wire Segment Perturbation and Dummification. In 2019 IEEE Computer Society Annual Symposium on VLSI, ISVLSI 2019, Miami, FL, USA, July 15-17, 2019. pages 212-217, IEEE, 2019. [doi]
Abstract is missing.