Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing - researchr publication authors

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Chen-Fu Chien 0001, Hans Ehm, John W. Fowler, Lars Mönch, Cheng-Hung Wu. Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing. In Winter Simulation Conference, WSC 2021, Phoenix, AZ, USA, December 12-15, 2021. pages 1-8, IEEE, 2021. [doi]

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