Chen-Fu Chien 0001, Hans Ehm, John W. Fowler, Lars Mönch, Cheng-Hung Wu. Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing. In Winter Simulation Conference, WSC 2021, Phoenix, AZ, USA, December 12-15, 2021. pages 1-8, IEEE, 2021. [doi]
@inproceedings{0001EFMW21,
title = {Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing},
author = {Chen-Fu Chien 0001 and Hans Ehm and John W. Fowler and Lars Mönch and Cheng-Hung Wu},
year = {2021},
doi = {10.1109/WSC52266.2021.9715399},
url = {https://doi.org/10.1109/WSC52266.2021.9715399},
researchr = {https://researchr.org/publication/0001EFMW21},
cites = {0},
citedby = {0},
pages = {1-8},
booktitle = { Winter Simulation Conference, WSC 2021, Phoenix, AZ, USA, December 12-15, 2021},
publisher = {IEEE},
isbn = {978-1-6654-3311-2},
}