Correlation of Dielectric Breakdown and Nanoscale Adhesion in Silicon Dioxide Thin Films

Alok Ranjan 0001, Sean J. O'Shea, Michel Bosman, J. Molina, Nagarajan Raghavan, Kin Leong Pey. Correlation of Dielectric Breakdown and Nanoscale Adhesion in Silicon Dioxide Thin Films. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-7, IEEE, 2020. [doi]

Abstract

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