Zhong Chen 0002, Zhipeng Li, Xianmin Zhang. Micro-vibration Measurement: How Best for Piezo-driven Flexure-guided Stages. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2019, Hong Kong, SAR, China, July 8-12, 2019. pages 1043-1048, IEEE, 2019. [doi]
Abstract is missing.